SUSS microscopy tool targets semiconductor failure analysis

-- Test & Measurement World, 11/26/2008 10:00:00 AM

The iVista LC high-resolution digital microscope from SUSS Micro Tec provides failure-analysis labs with a microscopy tool capable of delivering high-resolution digital images in conjunction with laser-cutting capabilities. iVista produces images with resolution that is comparable to a 16-megapixel color CCD sensor. It also includes a standard laser port to mount laser cutters from all major manufacturers.

A precision, automated objective changer allows you to switch from a magnification used for navigation to a higher magnification suitable for closer inspection and laser cutting. In addition, iVista comes with an optional polarizer/analyzer unit for liquid-crystal thermography applications and enhanced image contrast. For documentation tasks, you can save the full-resolution image and the multi-view screen.

Several additional software features in the Spectrum Vision System are enabled when using the iVista LC microscope in conjunction with an automated probe system. Multi-view allows you to create several freely-defined regions that are magnified and displayed alongside the main view, enabling live observation of specified areas.

Multi-cam imaging displays a live image from a separate camera alongside the live image from the iVista microscope. You can, for example, monitor contact height with the view from the ContactView system, while observing the position of the wafer and probe tips. Accurate point-to-point measurement and navigation tools using standard objectives are also provided.

SUSS MicroTec Test Systems, www.suss.com.